Finland-Helsinki: Laboratory, optical and precision equipments (excl. glasses)

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Tile Finland-Helsinki: Laboratory, optical and precision equipments (excl. glasses)
OJEU (High Value) 594292-2019
Type Invitation to tender
Date Published 2019-12-16
Deadline 2020-01-15 12:00:00
Nature Of Contract Supply contract
Awarding Authority Other
Awarding Criteria The most economic tender
Procedure Competitive dialogue

Description :
CONTRACT NOTICE


Section I: Contracting authority

I.1) Name and addresses:
Official name: University of Helsinki/Chemistry Department
National registration number: 0313471-7
Postal address: Yliopistonkatu 3
Town: Helsinki
Postal code: 00014
Country: FI
E-mail: hankinnat@helsinki.fi
NUTS code: FI1B
Main address (URL): https://www.helsinki.fi/fi

Communication
I.3) Procurement documents
(URL):https://hanki.tarjouspalvelu.fi/hanki?id=263285&tpk=1fd3fe72-0748-4658-90dc-ef95246638a4

Additional Information
I.3.4) Additional information can be obtained from:
I.3.6)Tenders or requests to participate must be submitted electronically via:
https://hanki.tarjouspalvelu.fi/hanki?id=263285&tpk=1fd3fe72-0748-4658-90dc-ef95246638a4
I.4) Type of the contracting authority:
University
I.5.2) Other activity -
Research

Section II: Object of Contract


Title:

Vacuum Cluster Connecting an ALD Reactor to Surface Analytical Instrument


II.1.4) Short description

The instrument will be acquired for Chemistry Department, University of Helsinki. The aim is to study atomic layer deposition (and etching) process mechanisms. The system connects an ALD reactor to a UHV cluster containing at least XPS (X-ray photoelectron spectroscopy) and TPD (temperature programmed desorption) chambers, optionally also FTIR chamber. Samples can be transferred through loadlocks from the ALD reactor to the UHV cluster and back. Samples are not full wafers but smaller pieces which in the ALD reactor are placed on a wafer size carrier. The offer may cover:

(i) the whole instrument;

(ii) the ALD reactor only; or

(iii) the UHV cluster with the analytical instruments. When offering only 1 part, the supplier needs to prepare ensuring proper interfacing between the ALD loadlock and the UHV loadlock to ensure a complete working system. Final designs for the interfacing are to be done at the negotiation phase of the procurement.


Information about lots
II.1.6) This contract is divided into lots: yes



Description: Item/Lot 1
Title:

ALD Reactor

II.2.1) Lot No: 1
NUTS code: FI1B
II.1.4) Short description

The ALD reactor must be of a hot wall flow type reactor with a loadlock. Besides its normal operation, the loadlock must allow connection to the UHV cluster so that samples can be transferred to the UHV loadlock and further to the UHV cluster and analytical chambers. Samples are not full wafers but smaller pieces which in the ALD reactor are placed on a wafer size carrier. The reactor should have at least 2 solid (heated) sources, 2 liquid (non-heated) sources and at least 1 gas inlet. The reaction chamber must have an operation temperature of at least 450 ºC. The reactor must be compatible with metal halides and other common ALD precursors (exceptions should be mentioned). The substrate size must be 100 mm wafers in minimum. The reactor must have windows for connecting an ellipsometer (FilmSense, already owned by the buyer) on a loadlock in minimum, but if possible directly to the chamber. Plasma source must be offered as an option. Ozone generator can be offered as an option. QCM and/or QMS can also be offered as options, but their proper operation for representative reaction mechanism studies need to be demonstrated. Also other options like FTIR can be offered.

II.2.5) Award criteria:

II.02.07) Duration in months 12
II.2.7.5) This contract is subject to renewal: no
II.2.10) Variants will be accepted: no
II.2.11) Options
II.2.11.2) Description of options

2 solid (heated) sources, 2 liquid (non-heated) sources, at least 1 gas inlet will be acquired. Additional sources as options. Plasma source must be offered as an option. Ozone generator can be offered as an option. QCM, QMS and/or FTIR can be offered as options, proper operation for representative reaction mechanism studies need to be demonstrated.



Description: Item/Lot 2
Title:

UHV Cluster and Surface Analytical Instruments

II.2.1) Lot No: 2
NUTS code: FI1B
II.1.4) Short description

UHV cluster must contain at least XPS (X-ray photoelectron spectroscopy) and TPD (temperature programmed desorption) instruments in separate chambers, optionally also a FTIR chamber. There must also be a distribution chamber(s) and system for transferring the samples between the analysis chambers and loadlocks. Samples are not full wafers but smaller pieces which in the ALD reactor are placed on a wafer size carrier from which they are picked for further transfer in the UHV cluster. One should also be able to return from the UHV side to the ALD reactor. There must also be a loadlock for a direct introduction of samples to the UHV cluster. XPS must be optimised for measuring chemical shifts: resolution and high count rate are emphasised. Sample holder should allow heating the sample up to at least 700 ºC. Ion beam gun for depth profiling and flood source for neutralising positive charging samples are also needed. Accessories to the XPS chamber should be offered; these may contain, but are not limited to, imaging XPS, ARXPS, ARPES, UPS, ISS, AES, EELS, LEED. TPD should have in minimum a mass spectrometer up to 300 amu and a port for gas inlet.

II.2.5) Award criteria:

II.02.07) Duration in months 12
II.2.7.5) This contract is subject to renewal: no
II.2.10) Variants will be accepted: no
II.2.11) Options
II.2.11.2) Description of options

FTIR as a separate chamber can be offered as an option. Optional accessories to XPS chamber may contain, but are not limited to, imaging XPS, ARXPS, ARPES, UPS, ISS, AES, EELS, LEED. Properly sized UPS for uninterrupted power supply for at least 1 h backup as an option. Sample holders included and options for additional holders. Optional warranty years.



Section III: Legal, economic, financial and technical information


Section IV: Procedure

IV.1.1) Type of procedure: Competitive Dialogue

IV.02.01) Time limit for receipt of tenders or requests to participate
IV.02.02) Date 2020-01-15
IV.02.02) Local time 12:00


IV.02.06) Duration in months (from the date stated for receipt of tender): 3

Section V: Complementary information


VI.2.1) Electonic ordering will be used
VI.2.2) Electronic invoicing will be accepted
VI.2.3) Electronic payment will be used

Review body:
Official name: Markkinaoikeus
Postal address: Radanrakentajantie 5
Town: Helsinki
Postal code: 00520
Country: FI
Telephone: +358 295643300
E-mail: markkinaoikeus@oikeus.fi
Fax: +358 295643314
URL: http://www.oikeus.fi/markkinaoikeus

Section VI

VI.05.00) Date of dispatch of this notice 2019-12-12

English Language Unavailable

CPV Codes
38000000; Laboratory, optical and precision equipments (excl. glasses);

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